Development of In-Situ Temperature Measurement Technology For MOCVD
碩士 === 國立交通大學 === 機械工程系所 === 102 === This thesis studies the thermal radiation theory and applies its measuring technology for developing the in-situ high-temperature pyrometry with the reflectance correction. Measuring accuracy and precision improvements of the low radiation in 400-600°C are also i...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/74960275052625015869 |