Optical Performance of Guided-Wave Silicon Optical Bench with Inertial Sensing Element
碩士 === 國立中央大學 === 光電科學與工程學系 === 102 === The guided-wave silicon optical bench (GW-SiOB) with inertial sensing element is proposed in this thesis. The working principle of the module as below: the external inertial force causes the membrane of inertial sensing element with vibration, and this vibrati...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/f32r75 |