Research of Silicon Heterojunction Solar Cell Fabricated by Bias Magnetron Sputtering
碩士 === 國立中央大學 === 照明與顯示科技研究所 === 102 === The aim of this research is the fabrication of silicon heterojunction solar cells by the PVD sputtering process. A bias magnetron sputtering process was used to replace the CVD process to prevent the disadvantages of the environmental pollution and the high...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/51632913975932423607 |