Investigation of Single Crystalline Germanium and Silicon-Germanium Thin Film on Silicon Substrate
碩士 === 國立中央大學 === 照明與顯示科技研究所 === 102 === This research aims at growing single crystalline germanium and silicon germanium thin films on silicon wafers by a sputtering method. The advantage of the sputtering method is its nontoxic process. If the single crystalline germanium or silicon-germanium film...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/wferqu |