The Study on Silicon Nitride Particles Defects Resulting from Chemical Vapor Deposition Using a Vertical Furnace
碩士 === 國立高雄海洋科技大學 === 微電子工程研究所 === 102 === As the size of semiconductor devices continue to shrink, particle plays an important role in vital defects. Recently, high-performance and small-size electronic components are highly developed using nano- scale-semiconductor technology. At the nanoscale, pa...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/6ukkfg |