The Optimization of Cuprous Oxide/Zinc Oxide Thin Film Properties Prepared by Sputtering Method
碩士 === 國立高雄第一科技大學 === 電機工程研究所碩士班 === 102 === In this thesis, zinc oxide and cuprous oxide film was sputtering on glass using sputtering system, and their characteristics was optimized by the Taguchi method. A L9 (34) orthogonal table with control factors sputtering power (A), argon oxygen gas flow r...
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/73726598539249034867 |