The Study of Optimum Leakage Data on Sealed Chambers by Using Differential Pressur Gauge with Diaphragm Valves
碩士 === 南開科技大學 === 電子工程研究所 === 102 === The thesis mainly investigates the rapid approach of leakage rate detection on sealed chambers in mass production processes as a new technique by using differential pressure gauge with diaphragm valves. The process of leakage detection of sealed chambers is one...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/19709290677117336599 |