A Study of the Mechanism of TiN to Anatase Transition by Thermal Oxidation
碩士 === 國立中山大學 === 材料與光電科學學系研究所 === 102 === This experiment used ion beam sputtering method to prepare epitaxy TiN (001) thin film on NaCl (001) surface by using Ti as target in a nitrogen atmosphere. The thin films were thermally oxidized in air at different temperatures to induce phase transition....
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/pf32jd |