Structural and optical properties of nonpolar a-ZnO grown by Rf-sputtering
碩士 === 國立中山大學 === 物理學系研究所 === 102 === This thesis focuses on studying the structural and optical properties of nonpolar a-ZnO thin films grown on r-Al2O3 substrates (a-ZnO/r-Al2O3). The crystallographic qualities and orientations of a-ZnO thin films grown by rf-sputtering are analyzed by X-ray diffr...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2014
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Online Access: | http://ndltd.ncl.edu.tw/handle/bc765w |