Planar Packaging Technology for Integrating ISFET IC and Microfluidic Chip and Its Applications in pH and Flow Rate Measurement
碩士 === 國立中山大學 === 機械與機電工程學系研究所 === 102 === This study developed a fast and microfluidic planarization packaging process that integrates the microfluidic systems and solid-state ISFET. It applies not only in flow measurement, but also improves the measurements in pH by oxygen plasma treatment. This s...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/6srjbz |