Study of the material properties and the mechanical loss of the silicon nitride films deposited by PECVD method on silicon cantilever for laser interference gravitational wave detector application

Study of the material properties and the mechanical loss of the silicon nitride films deposited by PECVD method on silicon cantilever for laser interference gravitational wave detector application

碩士 === 國立清華大學 === 光電工程研究所 === 102

Bibliographic Details
Main Authors:	Lee, Chia-Wei, 李家暐
Other Authors:	趙煦
Format:	Others
Language:	zh-TW
Published:	2013
Online Access:	http://ndltd.ncl.edu.tw/handle/17673511024020129213

Internet

http://ndltd.ncl.edu.tw/handle/17673511024020129213