Study on High-entropy Nitride Films of (Al,Cr,Nb,Si,B,C)100-xNx by DC Reactive Magnetron Sputtering

碩士 === 國立清華大學 === 材料科學工程學系 === 102 === 因申請專利緣故,資料延後公開

Bibliographic Details
Main Author: 蔡佳凌
Other Authors: 葉均蔚
Format: Others
Language:zh-TW
Published: 2014
Online Access:http://ndltd.ncl.edu.tw/handle/5xyxn3