Study on High-entropy Nitride Films of (Al,Cr,Nb,Si,B,C)100-xNx by DC Reactive Magnetron Sputtering
碩士 === 國立清華大學 === 材料科學工程學系 === 102 === 因申請專利緣故,資料延後公開
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Format: | Others |
Language: | zh-TW |
Published: |
2014
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Online Access: | http://ndltd.ncl.edu.tw/handle/5xyxn3 |