Dependence of substrate orientation on blistering and exfoliation behaviors in ion-implanted hydrogen in germanium

碩士 === 國立清華大學 === 工程與系統科學系 === 102

Bibliographic Details
Main Author: 錢其琛
Other Authors: 梁正宏
Format: Others
Language:zh-TW
Published: 2014
Online Access:http://ndltd.ncl.edu.tw/handle/28555386694234232194