Dependence of substrate orientation on blistering and exfoliation behaviors in ion-implanted hydrogen in germanium

碩士 === 國立清華大學 === 工程與系統科學系 === 102

Bibliographic Details
Main Author: 錢其琛
Other Authors: 梁正宏
Format: Others
Language:zh-TW
Published: 2014
Online Access:http://ndltd.ncl.edu.tw/handle/28555386694234232194
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spelling ndltd-TW-102NTHU55930792016-03-09T04:31:11Z http://ndltd.ncl.edu.tw/handle/28555386694234232194 Dependence of substrate orientation on blistering and exfoliation behaviors in ion-implanted hydrogen in germanium 氫分子離子佈植於不同晶向之鍺靶材內部所引起表面發泡與發泡破裂行為研究 錢其琛 碩士 國立清華大學 工程與系統科學系 102 梁正宏 2014 學位論文 ; thesis 82 zh-TW
collection NDLTD
language zh-TW
format Others
sources NDLTD
description 碩士 === 國立清華大學 === 工程與系統科學系 === 102
author2 梁正宏
author_facet 梁正宏
錢其琛
author 錢其琛
spellingShingle 錢其琛
Dependence of substrate orientation on blistering and exfoliation behaviors in ion-implanted hydrogen in germanium
author_sort 錢其琛
title Dependence of substrate orientation on blistering and exfoliation behaviors in ion-implanted hydrogen in germanium
title_short Dependence of substrate orientation on blistering and exfoliation behaviors in ion-implanted hydrogen in germanium
title_full Dependence of substrate orientation on blistering and exfoliation behaviors in ion-implanted hydrogen in germanium
title_fullStr Dependence of substrate orientation on blistering and exfoliation behaviors in ion-implanted hydrogen in germanium
title_full_unstemmed Dependence of substrate orientation on blistering and exfoliation behaviors in ion-implanted hydrogen in germanium
title_sort dependence of substrate orientation on blistering and exfoliation behaviors in ion-implanted hydrogen in germanium
publishDate 2014
url http://ndltd.ncl.edu.tw/handle/28555386694234232194
work_keys_str_mv AT qiánqíchēn dependenceofsubstrateorientationonblisteringandexfoliationbehaviorsinionimplantedhydrogeningermanium
AT qiánqíchēn qīngfēnzilízibùzhíyúbùtóngjīngxiàngzhīduǒbǎcáinèibùsuǒyǐnqǐbiǎomiànfāpàoyǔfāpàopòlièxíngwèiyánjiū
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