Dependence of substrate orientation on blistering and exfoliation behaviors in ion-implanted hydrogen in germanium
碩士 === 國立清華大學 === 工程與系統科學系 === 102
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ndltd-TW-102NTHU55930792016-03-09T04:31:11Z http://ndltd.ncl.edu.tw/handle/28555386694234232194 Dependence of substrate orientation on blistering and exfoliation behaviors in ion-implanted hydrogen in germanium 氫分子離子佈植於不同晶向之鍺靶材內部所引起表面發泡與發泡破裂行為研究 錢其琛 碩士 國立清華大學 工程與系統科學系 102 梁正宏 2014 學位論文 ; thesis 82 zh-TW |
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碩士 === 國立清華大學 === 工程與系統科學系 === 102 |
author2 |
梁正宏 |
author_facet |
梁正宏 錢其琛 |
author |
錢其琛 |
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錢其琛 Dependence of substrate orientation on blistering and exfoliation behaviors in ion-implanted hydrogen in germanium |
author_sort |
錢其琛 |
title |
Dependence of substrate orientation on blistering and exfoliation behaviors in ion-implanted hydrogen in germanium |
title_short |
Dependence of substrate orientation on blistering and exfoliation behaviors in ion-implanted hydrogen in germanium |
title_full |
Dependence of substrate orientation on blistering and exfoliation behaviors in ion-implanted hydrogen in germanium |
title_fullStr |
Dependence of substrate orientation on blistering and exfoliation behaviors in ion-implanted hydrogen in germanium |
title_full_unstemmed |
Dependence of substrate orientation on blistering and exfoliation behaviors in ion-implanted hydrogen in germanium |
title_sort |
dependence of substrate orientation on blistering and exfoliation behaviors in ion-implanted hydrogen in germanium |
publishDate |
2014 |
url |
http://ndltd.ncl.edu.tw/handle/28555386694234232194 |
work_keys_str_mv |
AT qiánqíchēn dependenceofsubstrateorientationonblisteringandexfoliationbehaviorsinionimplantedhydrogeningermanium AT qiánqíchēn qīngfēnzilízibùzhíyúbùtóngjīngxiàngzhīduǒbǎcáinèibùsuǒyǐnqǐbiǎomiànfāpàoyǔfāpàopòlièxíngwèiyánjiū |
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