Implementation of High-Efficiency Photodetectors with Metal Grating Structures Using Standard CMOS Process
碩士 === 國立臺灣大學 === 工程科學及海洋工程學研究所 === 102 === This work demonstrates a new way to improve the effectiveness of photodetectors fabricated by standard silicon process technologies. With the metal layers of the standard process,we design an optical structure called optical grating. When incident light pa...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/04604800995335773580 |