Based on Lissajous Hierarchical Local Scan to Realize High Speed and Large Range Atomic Force Microscopy

博士 === 國立臺灣大學 === 電機工程學研究所 === 102 === Atomic force microscopy (AFM) is a very useful measurement instrument. It can scan the conductive and nonconductive samples and without any restriction in the environments of application. Therefore, it has become an indispensable micro/nano scale measurement to...

Full description

Bibliographic Details
Main Authors: Jim-Wei Wu, 吳俊緯
Other Authors: 傅立成
Format: Others
Language:en_US
Published: 2013
Online Access:http://ndltd.ncl.edu.tw/handle/82128708952583223676