Development of High Precision Nanometer Level Co-planar Stage
博士 === 國立臺灣大學 === 機械工程學研究所 === 102 === With the continuing trend toward device miniaturization in many engineering and scientific fields, the need to accomplish highly-precise stage at the micro- or nanoscale has emerged as a critical concern. This research presents a series of key technologies with...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/95949248695932764714 |