Design and Control of an Integrated Multiple-Axis Long-Stroke Nano-positioning Stage
碩士 === 國立臺灣大學 === 機械工程學研究所 === 102 === This thesis develops a long-travel, nano-positioning stage. We develop a three-dimensional piezoelectric (PZT) stage, and integrate a compensated three-dimensional stage to achieve six-dimensional nano-positioning. Then we combine the PZT stages with a stepper...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/19891508607237584259 |