Design and Control of an Integrated Multiple-Axis Long-Stroke Nano-positioning Stage

• Main Authors: Ru-Chang Wu, 吳儒昌
• Other Authors: Fu-Cheng Wang
• Format: Others
• Language: zh-TW
• Published: 2014
• Online Access: http://ndltd.ncl.edu.tw/handle/19891508607237584259

碩士 === 國立臺灣大學 === 機械工程學研究所 === 102 === This thesis develops a long-travel, nano-positioning stage. We develop a three-dimensional piezoelectric (PZT) stage, and integrate a compensated three-dimensional stage to achieve six-dimensional nano-positioning. Then we combine the PZT stages with a stepper stage to accomplish a long-stroke precision-positioning stage. As technology develops, precision positioning is increasingly important. Because traditional mechanical structures cannot satisfy the nano-positioning requirements, piezoelectric materials are normally applied to drive the precision stages because of the advantageous properties, such as high precision, large force and high resolution. However, the performance of PZT stages is also constrained by their limited travel and the nonlinear properties, such as hysteresis and creep. Therefore, in this thesis we design robust controllers to improve system performance and stability of a X-Y-θPZT stage, and then integrate it with a Z-φ-ψ stage to accomplish six-dimensional nano-positioning. Last, we integrate the PZT stage with a stepper stage to achieve long-stroke precision positioning. Because the stepper motor stage has the disadvantages of limited resolution and fall-out step, we design path-adjustment and phase-compensation to improve its performance. The experimental results demonstrate the effectiveness of the developed combined stage.