Research on the Volumetric Error Compensation of Micro Coordinate Measuring Machine
碩士 === 國立臺灣大學 === 機械工程學研究所 === 102 === In the modern metrological technology, traditional coordinate measuring machines (CMM) is not able to satisfy the required precision and accuracy in micro/nano scale. Therefore, NTU Metrology Lab developed a Micro coordinate measuring machine (Micro-CMM) with...
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Format: | Others |
Language: | zh-TW |
Published: |
2014
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Online Access: | http://ndltd.ncl.edu.tw/handle/22202885773959099500 |