Charge Feedback Hysteresis Disturbance Observer Design of a Multi-axis Piezo-actuated Stage
碩士 === 國立臺灣大學 === 機械工程學研究所 === 102 === Piezo-actuated stage has excellent dynamic response and high resolution, and is widely used in micro- or nanoscale precision positioning systems. However, the nonlinearities such as hysteresis and creep make its control very difficult. In this thesis, the hyst...
| Main Authors: | , |
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| Format: | Others |
| Language: | en_US |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/85133219651842456001 |