Structure Design And Performance Analysis Of High-G Piezoresistive Micro-Accelerometer
碩士 === 國立臺灣大學 === 應用力學研究所 === 102 === Micro-accelerometer is a tiny sensing component which can convert as well as output acceleration into analog signals. Over the past decade, the technique of semiconductor process has been greatly improved. Since the MEMS processing is compatible with the CMOS...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/82900757155725961985 |