Fabrication and Layout Improvement of Implantable Microelectrode Array Probes for Biosensing Applications
碩士 === 國立臺灣科技大學 === 化學工程系 === 102 === In this research, the semiconductor manufacturing technology we used to fabricate implantable microelectrode array (MEA) probes. The manufacturing process that we used included thermal oxidation, photolithography, thin film deposition and etching. We optimized e...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/59303984446491851010 |