Growth and characterization of nitrogen doped ZnO
碩士 === 國立臺灣科技大學 === 電子工程系 === 102 === Nitrogen doped ZnO thin films were prepared by reactive ion beam sputter deposition. Argon, oxygen and nitrogen were passed simultaneously through the ion source and the effect of gas flow rates on nitrogen doped ZnO were characterized. Experimental results show...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/54299612587803582505 |