Diamond Lapping with Hydrogen Peroxide Slurry for Planarization of Mono-Crystalline Sapphire Wafer
碩士 === 國立臺灣科技大學 === 機械工程系 === 102 === The impact of LED on people’s daily life is increasing and the sapphire wafer is used as substrate of LED due to its high transparency and its well high lattice matching with GaN. However, the planarization process of sapphire wafer takes a long time owing to it...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/99371087106172310995 |