Development of six-degree-of-freedom wave-length modulated heterodyne grating interferometer
碩士 === 國立臺灣科技大學 === 機械工程系 === 102 === In this study, a novel wavelength-modulated heterodyne grating interferometer is proposed for six-degree-of-freedom (6-DOF) displacement and angular displacement measurements. This proposed interferometer has the advantages of heterodyne interferometry, Michelso...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/65144063554935927948 |