Processing and Property Characterization of Mg-Doped InGaN Thin Films Prepared by Reactive Sputtering
碩士 === 國立臺灣科技大學 === 材料科學與工程系 === 102 === In this research, we successfully deposited p-type Mg-doped InGaN (Mg-InGaN) films by RF sputtering with single cermet targets. All the thin films were analysised by EDS, SEM, AFM, XRD, Hall Effect measurement, and UV. This study was divided into three parts....
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/59143377698183796057 |