Effect of Fabrication Process on the Characteristics of IGZO Thin Films and Devices
碩士 === 國立高雄大學 === 化學工程及材料工程學系碩士班 === 102 === In this work, comparison of RF magnetron sputtering and electron beam evaporation deposition of IGZO thin films. First,we investigate the single component sputtering target and co-sputtering.we change different parameters of a single ingredient and get th...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/24861383469945570019 |