Influence of Characteristic and Reliability on UTBB SOI nMOSFETs with different Temperature
碩士 === 國立高雄大學 === 電機工程學系碩士班 === 102 === As the devices have been aggressively scaling down, short channel effects (SCEs) become serious problems. In order to avoid short channel effects, the ultra-thin body and buried oxide Silicon-on-Insulator (UTBB SOI) devices were used. Two kinds of dopant conce...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/71230212632570231189 |