Preparation of Silver-Copper Alloy Film by Electroplating and the Application of the Film on Metallization

碩士 === 國立虎尾科技大學 === 材料科學與綠色能源工程研究所 === 102 === In recent years, high aspect ratio process and low-resistance material are increasing needed for intercomection. A wet process has became increasingly importance. Silver has potential to replace copper as an interconnect material became it has a low...

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Bibliographic Details
Main Authors: Kai-Min Chang, 張凱民
Other Authors: Jau-Shiung Fang
Format: Others
Language:zh-TW
Published: 2014
Online Access:http://ndltd.ncl.edu.tw/handle/j3u3mt