Design of XXY Precision Alignment Motion Controller
碩士 === 國立虎尾科技大學 === 電子工程系碩士班 === 102 === The thesis proposes a customized motion controller for XXY precision alignment stage to improve the traditional motion control system. The controller replaces the general motion controller so as to greatly reduce the system cost, and the inverse kinematic...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/gn8gr6 |