Mechanical Properties and Coating Design of AlCrSiTiVN Nanocomposite Thin Films

碩士 === 國立虎尾科技大學 === 機械與電腦輔助工程系碩士班 === 102 === AlCrSiTiVN multicomponent thin films were prepared on silicon and tungsten carbide samples using a cathodic arc deposition system. Ti60V40 and Cr60Al30Si10 cathodes were used for the deposition of AlCrSiTiV multicomponent thin films. By controlling the T...

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Bibliographic Details
Main Authors: Yu-Kai Chou, 周于凱
Other Authors: 張銀祐
Format: Others
Language:zh-TW
Published: 2014
Online Access:http://ndltd.ncl.edu.tw/handle/bk7h3z