Mechanical Properties and Coating Design of AlCrSiTiVN Nanocomposite Thin Films
碩士 === 國立虎尾科技大學 === 機械與電腦輔助工程系碩士班 === 102 === AlCrSiTiVN multicomponent thin films were prepared on silicon and tungsten carbide samples using a cathodic arc deposition system. Ti60V40 and Cr60Al30Si10 cathodes were used for the deposition of AlCrSiTiV multicomponent thin films. By controlling the T...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/bk7h3z |