Mechancical Properties and Corrosion of DLC Films by PVD and PECVD Process

碩士 === 國立虎尾科技大學 === 機械與電腦輔助工程系碩士班 === 102 === Diamond-like carbon (DLC) thin films, which are usually black, are used for decorative applications because of their good corrosion-resistance and chemical inertness. In this study, we used a physical vapor deposition (PVD) to prepare a Cr-C film, while...

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Bibliographic Details
Main Authors: Chao-Hsiang Chang, 張朝翔
Other Authors: 張銀祐
Format: Others
Language:zh-TW
Published: 2014
Online Access:http://ndltd.ncl.edu.tw/handle/yymscp