Effects of film stress on the fabrication of nanopillar arrays by using anodic aluminum oxide foils

碩士 === 南台科技大學 === 光電工程系 === 102 === In this study, we used anodic alumina as template for deposition of SnO2 and TiO2 by ALD to obtain TiO2/SnO2 core-shell nanord structure and used titanium film on the bottom of nanorods as the conduction layer. Because of the difference of energy band edges of SnO...

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Bibliographic Details
Main Authors: Cheng-Sian Lin, 林承憲
Other Authors: Hsyi-En Cheng
Format: Others
Language:zh-TW
Published: 103
Online Access:http://ndltd.ncl.edu.tw/handle/q6dqe4