Structure and ferroelectric properties of sputtered BiFeO3 films on glass substrates
碩士 === 東海大學 === 物理學系 === 102 === In this present work, BiFeO3 thin films with 200 nm in thickness were deposited on Pt/glass substrates by rf magnetron sputtering. In order to optimize the ferroelectric properties of BiFeO3 films, effects of thickness of Pt bottom layer, growth temperature, pressure...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/86901769382526154663 |