Characteristic of GZO thin films by DC magnetron sputtering
碩士 === 國立臺北科技大學 === 工程科技研究所 === 102 === Gallium-doped zinc oxide (GZO) thin film was deposited on glass substrates using the direct-current (DC) magnetron sputtering system with a GZO ceramic target .(The Ga2O3 contents are approximately 0.6 wt.%).The optical and electrical properties of GZO thin fi...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/d9tpn6 |