Experimental Study on the Moisture Control in Wafer Carrier
博士 === 國立臺北科技大學 === 冷凍空調工程系所 === 102 === This study is designated to experimentally determine the effect of varied clean dry air (CDA) purging rate on the alteration rate of moisture content inside an alpha version of 450 mm polycarbonate (PC) Front Opening Unified Pod (FOUP), and to investigate the...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/9swt7k |