Numerical Investigation of Fresh Air Quality of Makeup Air Unit Influenced by Fab Exhaust.
碩士 === 國立臺北科技大學 === 能源與冷凍空調工程系碩士班 === 102 === As the semiconductor technology has shrunk the half-pitch (hp) node into nanometer scales, more attention has been directed toward the yield-affecting influences from the air quality of manufacturing environment. Re-entrainment of potential pollutants in...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/xvw9j6 |