Growth and Characterization of Transparent Conductive Oxide InGaSnO Thin Films
碩士 === 大同大學 === 光電工程研究所 === 102 === In this work, InGaSnO (IGTO) thin films were grown by plasma-assisted molecular beam epitaxy in order to demonstrate quaternary semiconductor IGTO suitable for transparent conductive oxide (TCO) applications. First of all, In1-xGaxO (x means the cation atoms perce...
| Main Authors: | , |
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| Format: | Others |
| Language: | en_US |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/946pan |