Preparation of Pr-Fe-B thin films with perpendicular magnetic anisotropy
碩士 === 元智大學 === 化學工程與材料科學學系 === 102 === Perpendicular magnetic anisotropy (PMA) Pr-Fe-B films were prepared by magnetron sputtering system with alloy target in ultrahigh vacuum chamber. The effects of magnetic layer thickness (t), annealed conditions, underlayer types (Si3N4、Ta), and substrate types...
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| Format: | Others |
| Language: | zh-TW |
| Online Access: | http://ndltd.ncl.edu.tw/handle/k54z4z |