Deposition of zinc oxide thin films by RF magnetron sputtering as the applcation of surface acoustic wave devices
碩士 === 中華科技大學 === 機電光工程研究所碩士班 === 103 === This study is divided into two parts, the first part is using the RF magnetron sputtering system deposit zinc oxide on different substrates, and using XRD, AFM, the Hall effect compares room temperature’s and high temperature’s FWHM, roughness and resistance...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2015
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| Online Access: | http://ndltd.ncl.edu.tw/handle/75465206740784653120 |