Study of Growth and Heterojunction Diode for Zn3N2 Thin Films Fabricated by RF Magnetron Sputtering
碩士 === 正修科技大學 === 電子工程研究所 === 103 === This thesis can be classified two experiments. (1)First, Zn3N2 films are deposited on the (100) silicon substrates and c-plane (0001) Sapphire substrates by rf magnetron sputtering, And change to a different process pressure.(2)The first part of the experime...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2015
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/bu729m |