Characterization of HfO2 and Ta2O5 transparent thin films prepared by sol-gel method
碩士 === 中原大學 === 電子工程研究所 === 103 === In this thesis, HfO2, Ta2O5 and the mixed films of both are prepared by the sol-gel method. The thin films crystal structure, optical properties and electrical properties are analyzed by different mixing ratio, annealing temperature and the film thickness. HfC...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2015
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| Online Access: | http://ndltd.ncl.edu.tw/handle/9h5752 |