The Study of Defect in ZnO Thin film Semiconductor
碩士 === 大葉大學 === 電機工程學系 === 103 === We investigate the ZnO thin film deposited on Corning glass substrates by Rapid Thermal Chemical Vapor Deposition (RTCVD). The transparent ZnO thin films are grown at different temperatures in a particular deposition time. The energy defect traps can be analyze...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2015
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/20940434701423710525 |