Development of Nanofiber-based Gas Microsensors by Using Electrospun Technology
碩士 === 逢甲大學 === 自動控制工程學系 === 103 === The research presents the design of metal-oxide semiconductor gas microsensors based on MEMS technology and nano-properties for sensing CO gas. Sensitivity is defined by measuring the variation of resistance for sensing layers caused by Schottky contanct when gas...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2015
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| Online Access: | http://ndltd.ncl.edu.tw/handle/49677804564614472572 |