Effects of Different Annealing Temperatures at Hydrogen atmosphere on Structural, Optical and Electrical Properties of the AZO thin Films
碩士 === 崑山科技大學 === 電腦與通訊研究所 === 103 === This study presents transparent conductive AZO（Al-doped ZnO）by using RF magnetron sputtering and rapid thermal annealing . The optical and electrical characteristics of AZO single layer structure were studied. The influences of AZO annealing atmosphere on the o...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2015
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| Online Access: | http://ndltd.ncl.edu.tw/handle/90203927650347452089 |