Study on the Improvement of PWQ
碩士 === 國立高雄應用科技大學 === 電子工程系碩士班 === 103 === In the professional semiconductor foundry fab, the R&D stage is to make Process Window bigger that it can make the advanced process developing faster. Especially, the process is launching out into the “FinFET” step, and the line width is approaching m...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2015
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| Online Access: | http://ndltd.ncl.edu.tw/handle/rchfs3 |