Study on Precise Spraying Coating Process for Fabrication of Microstructures Device

碩士 === 國立高雄應用科技大學 === 模具工程系 === 103 === Micro-structural elements are key parts of micro mechanical system, micro optics system, micro-electronic integrated component and biological micro electro-mechanical system. At present, there are many manufacturing technologies of micro-structural elements in...

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Bibliographic Details
Main Authors: Yu-Hsiang Huang, 黃郁翔
Other Authors: Chih-Yuan Chang
Format: Others
Language:zh-TW
Published: 2015
Online Access:http://ndltd.ncl.edu.tw/handle/76622516734501568357