Study on Precise Spraying Coating Process for Fabrication of Microstructures Device
碩士 === 國立高雄應用科技大學 === 模具工程系 === 103 === Micro-structural elements are key parts of micro mechanical system, micro optics system, micro-electronic integrated component and biological micro electro-mechanical system. At present, there are many manufacturing technologies of micro-structural elements in...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2015
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Online Access: | http://ndltd.ncl.edu.tw/handle/76622516734501568357 |