Design, Fabrication and Measurement of Highly Sensitive CMOS-MEMS Pirani Gauges
碩士 === 國立高雄應用科技大學 === 光電與通訊工程研究所 === 103 === The purposes of this dissertation are to design, fabricate, and measure a highly sensitive CMOS-MEMS Pirani gauge. A traditional MEMS Pirani gauge consists of a single sensing resistor formed on a thermally isolated structure. The temperature of the sen...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2015
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/969t52 |